Mostly not slang:
Penny     probably from an old word meaning a piece of cloth
it's been in the language as a coin name since before
the beginning

Nickel As you suspected, from the metal

Dime It means one-tenth, from Latin decimus

Slang:

Fin Five dollar bill, from Yiddish finf, five.

Sawbuck From the Roman numeral X, the shape of a sawbuck or sawhorse.